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300mm Wafer Heating & Cooling Stations - Owens Design
Cost effective heating and cooling of 300mm wafers without contamination is extremely difficult. Owens Design has developed a 300 mm wafer pre-heat and post-cool station that provides …
Semiconductor and Wafer Processing Solutions - Cast Aluminum …
CAS designs & manufactures wafer heaters for semiconductor chambers, pedestal heaters & chucks, 200 & 300 mm parts, semi gas & solvent heters, and more. Cast Aluminum Solutions …
VF-5900 Vertical Furnace for 300-mm Wafers
This large-batch mass-production type vertical diffusion furnace can process a maximum of 100 wafers (300-mm / 12-inch) or 16 FOUPs a batch. An LGO heater is used for superior temperature characteristics from low temperatures to …
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Vertical furnace - JTEKT CORPORATION
VF-5700 Vertical Furnace for 300mm Wafers. This heat treatment system performs silicon wafer, IGBT, polyimide and thin wafer oxidation, diffusion and CVD. Since its height is less than 3000 …
Hot Chuck 300mm Heater - belilove.com
Hot Chuck Heater 300mm. Used for semiconductor wafer heating. A vacuum brazed-in 6061 T6 aluminum heater with a 2-3 Ra µin surface finish. Design includes a proprietary internal element patterns, notches, and thermocouple …
To heat a 300mm silicon wafer, for example, one could simply laminate a uniform watt density etched foil heater to the bottom of a 300mm diameter plate. However, due to the surface area …
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c.HORICOO 300 | centrotherm
Based on centrotherm‘s extensive expertise in the semiconductor industry, c.HORICOO 300 is the new high-throughput platform for state-of-the-art wafer processing. The heating element …
Vertical Furnace Furnaces for 300mm Semiconductor …
The VF-5900, designed to process 300-mm wafers, can accept a stack of 12 FOUPs (Front Opening Unified Pods) and can continuously process 2 batches, each of 100 wafers. All the FOUPs loaded into the I/O port are conveyed to …
Novellus VECTOR Process Pedestal 300mm - EMPBV
Novellus VECTOR Process Pedestal 300mm. Features/specs: Temperature Uniformity; Cost Competitiveness; Weight: 28.56kg; Material: Al 3003; Pipe: Al 3003; Heater Re: 12Ω ±1.5; Novellus Vector Process Pedestal Heater 300mm. …
SONORA® 300mm vertical furnace - ASM
SONORA is a 300mm batch vertical furnace for logic/foundry and memory applications, as well as 300mm analog/power. SONORA is capable of both atmospheric and low-pressure thermal wafer processing.
This platen heater design is ideal for prototype aluminum 356 with optional add-on machine trials or engineering experiments features. The stock anodized cast as well as temporary repairs …
Wenesco Hot Plates for Wafer Manufacturing
Heat-cool feature. Wenesco's hot vacuum chuck utilizes high uniformity heaters controlled with an accurate digital thermostat to assure even heating across the entire plate. The wafer is …
Temptronic ThermoChuck Systems - Cold
Its primary use is for wafer testing in Probe Stations, as well as Laser Trim and Wafer Burn-in. A few specialized applications include Low leakage probing (fA level), and High voltage probing …
Thermal design of hot plate for 300-mm wafer heating in post …
Nov 1, 2011 · Temperature uniformity of a wafer during post-exposure bake (PEB) in lithography is an important factor in controlling critical dimension (CD) uniformity. In this study, a new hot …
Thermal design of hot plate for 300-mm wafer heating in post …
Nov 1, 2011 · Temperature uniformity of a wafer during post-exposure bake (PEB) in lithography is an important factor in controlling critical dimension (CD) uniformity. In this study, a new hot …
P300L Semi-Automatic Probe Station - Micromanipulator
The P300L is the station of choice for a high performance, full capability, first in class flexibility, and cost-effective 300 mm semi-automatic probe station.
$400M in Federal Funding Advances Manufacturing Innovation in …
Jul 18, 2024 · The company’s original project expanded wafer production during an acute global chip shortage, adding capacity for 300mm silicon-on-insulator wafer manufacturing, and …
St. Louis region silicon wafer plant to get federal millions | STLPR
Jul 17, 2024 · The expansion of the O’Fallon facility will produce 300mm silicon-on-insulator wafers, which are two silicon wafers joined together with a film in-between them, said Karla …
Laser Wafer Heating Demonstration - ipgphotonics.com
Our findings suggest that using a laser solution for wafer heating offers attractive energy and cycle time savings. Beyond the energy savings inherent to laser heating, additional efficiency is …
MEMC Celebrates $300 Million Expansion in O’Fallon, Missouri
Jul 26, 2023 · This expansion adds capacity for 300mm silicon-on-insulator wafer manufacturing, including the creation of 100 new jobs, and brings more manufacturing capabilities back to the …
GWC, GLOBALFOUNDRIES to expand Missouri silicon wafer …
Jun 9, 2021 · The 300mm wafers made at GWC’s Missouri plant will be used at GLOBALFOUNDRIES’ most advanced manufacturing facilty, Fab 8, in Malta, New York, while …
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