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  1. Three-dimensional integration of two-dimensional field-effect ...

    • In the field of semiconductors, three-dimensional (3D) integration not only enables packaging of more devices per unit area, referred to as ‘More Moore’1 but also introduces multifunctionalities for ‘More t… See more

    Main

    Scaling of silicon field-effect transistors (FETs) following Moore’s law has been instrumental in … See more

    Nature
    3D integration of 2D FETs

    MoS2 and WSe2 films used in this study were grown on epi-ready 2-inch c-plane sapphire (α-Al2O3) substrates using metal-organic chemical vapour deposition. The growth par… See more

    Nature
    Two-tier wafer-scale 3D stack of MoS2 FETs

    Electrical characterization on different tiers was performed sequentially and before depositing necessary vias and connections for circuit demonstrations. Figure 2a,b shows the t… See more

    Nature
    Three-tier 3D stack of 2D FETs

    We establish the robustness of the fabrication process flow to a higher number of tiers by demonstrating three-tier 3D integrated chips based on MoS2 and WSe2. A M… See more

    Nature
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  2. More Moore: From device scaling to 3D integration and system …

     
  3. Monolithic three-dimensional integration of complementary two

  4. More Moore: From device scaling to 3D integration and system …

  5. 3D integration of 2D electronics - Nature

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  7. Integrating dimensions to get more out of Moore’s Law …

    Jan 10, 2024 · Penn State researchers demonstrated 3D integration of semiconductors at a massive scale, characterizing tens of thousands of devices using 2D transistors made with 2D semiconductors, enabling electronic …

  8. The bridge between More than Moore and More Moore - IEEE …

  9. Emerging monolithic 3D integration: Opportunities and challenges …

  10. Adding a new layer to ‘more than Moore’ - Nature

  11. Integrating dimensions to get more out of Moore’s Law

  12. Integrating dimensions to get more out of Moore's Law and …

  13. 2D materials-based 3D integration for neuromorphic hardware

  14. More-Than-Moore: 3D heterogeneous integration into CMOS …

  15. Integrating dimensions to get more out of Moore’s Law and …